Word: microsensors
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Dates: during 1989-1989
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Sensors like those made by Delco were the first to combine microelectronics and micromachines on one chip. The typical microsensor is a thin silicon diaphragm studded with resistors. Because the electrical resistance of silicon crystals changes when they are bent, the slightest stress on the diaphragm can be registered by the resistors and amplified by electronic circuits...
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