Word: polysilicon
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Dates: during 1980-1989
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With the advent of silicon gears, springs and cantilevers, machines will become smaller still. These miniature moving parts can be etched on silicon using a variation on the photolithographic technique used to make computer chips. To build a tiny rotating arm, for example, layers of polysilicon and a type of glass that can be removed with acid are deposited on a silicon base. A hole for the hub is lined with the glass and then filled with polysilicon. When the glass is etched away, the hub remains and the arm is free to spin around its axis...
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